Design, measurement and modeling process of Si integrated inductors for implanted transmitters
نویسنده
چکیده
This work shows the process of characterization and modeling of integrated inductors in CMOS silicon technology for biotelemetry applications [1]. Three planar square inductors with different geometrical characteristics were designed, using the 2 μm CMOS technology of AMS. With physical models [2, 3] and the software ASITIC, was possible to define the geometrical characteristics of the inductors. The full two-port S-parameters of the inductors and the pads were obtained with an HP Network Analyzer 8510C and a station cascade ground-signal-ground, over a frequency range from 45 MHz to 3 GHz. Fig. 1 shows a chip with three inductors and the pads.
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